A Novel Fabrication Method of Microlens Array with Aperture Stop for Projection Photolithography
碩士 === 國立臺灣大學 === 機械工程學研究所 === 94 === Microlens lithography is a contactless lithographic method that uses a smart mask which consists of an array of spherical microlens to project the pattern on transparent mask onto a photo-resist layer. The array of microstructures can be fabricated in a single e...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41048018934363010693 |