Measurements of Interface Traps and Depth Profiling of Border Traps in MOSFETs with High-K Gate Dielectrics

碩士 === 國立清華大學 === 工程與系統科學系 === 94 ===

Bibliographic Details
Main Authors: Chen-Hao Huang, 黃振浩
Other Authors: Kuei-Shu Chang-Liao
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/78667355420538205419