Synthesis and Characterization of Nano-crystalline TiNxOy Thin Films by Unbalanced Magnetron Sputtering System (UBMS)

• Main Authors: Shao-Hsien Chiu, 邱紹賢
• Other Authors: Ge-Ping Yu
• Format: Others
• Language: en_US
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/09283768800004527463

碩士 === 國立清華大學 === 工程與系統科學系 === 94 === The functional colored hard coating has been developed to offer more advantages for decorations in recent years. A favored class of material is TiNxOy thin film which has substantial attentions by a variety of colorations and available mechanical properties. In this study, TiNxOy thin films were deposited by unbalanced magnetron sputtering with addition of oxygen and nitrogen at 350℃. The results show that the film coloration changes from warmer golden to vivid green and the hardness value is ranged from 20.8 to 11.6 GPa as the oxygen content was increased from 7 to 60 at %. The compressive residual stress of TiNxOy thin films was measured by modified XRD sin2Ψ and optical methods. The compressive stress shows that a gradual relief of stress from -4.75 to -1.10 GPa with the increasing oxygen content. Distinct change in microstructure is observed in SEM cross-section microscopy that the columnar structure further develops to cone shape of coarse columnar structure when the oxygen content increases from 39 to 60 at %. It is noted that the electrical resistivity of TiNxOy thin film for 7 at % oxygen content was measured only 20.7μΩ-cm which approaches to that of the single crystalline TiN film (15μΩ-cm). The texture evolution exhibits a significant transition from (111) preferred orientation to (200) dominated orientation for films between 12 at % and 32 at % oxygen content. Furthermore, the intrinsic corrosion potential of TiNxOy thin films is determined to have superior corrosive resistance in 1N H2SO4 solution since the measured Ecorr is at least + 60 mVAg/AgCl. The TiNxOy thin film maintains a suitable mechanical property for decorative applications, and the corrosion resistance can survive the attack of severe environment.