Synthesis and Characterization of Nano-crystalline TiNxOy Thin Films by Unbalanced Magnetron Sputtering System (UBMS)
碩士 === 國立清華大學 === 工程與系統科學系 === 94 === The functional colored hard coating has been developed to offer more advantages for decorations in recent years. A favored class of material is TiNxOy thin film which has substantial attentions by a variety of colorations and available mechanical properties. In...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09283768800004527463 |