Friction Effect on Metallic Pattern Formation by Using Direct Nanoimprint
碩士 === 國立清華大學 === 動力機械工程學系 === 94 === This thesis presents a study on the forces generated between the mold and thin film and their impacts on the formation of nano-scale structures on aluminum thin film by using direct nanoimprint. Molecular dynamics (MD) simulation is first employed to investigate...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90108075806323074858 |