Investigation of package effect of Si-based piezo-resistive micro pressure sensor
碩士 === 國立清華大學 === 動力機械工程學系 === 94 === Since the piezoresistive effect was discovered, the applications of piezoresistive sensors have been widely employed in mechanical signal sensing. The silicon-based pressure sensor is one of the major applications of the MEMS device. Nowadays, the silicon piezor...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/09882182418424041556 |