Experimental study for the local heat transfer on a rectangular substrate in TFT-LCD manufacturing process
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 94 === Chemical vapor deposition is an important thin film process for the fabrication of TFT-LCD(Thin-Film-Transistor Liquid Crystal Display), the heat transfer coefficient on the substrate is the important influence parameter in the manufacturing process. For thi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78864129369474542917 |