The Study of Solidly Mounted Resonators and FiltersUsing Mo/SiO2 as Bragg Reflector
碩士 === 國立中山大學 === 電機工程學系研究所 === 94 === In this study, the Bragg reflectors deposited by DC and RF magnetron sputtering are composed of alternating layers of high and low acoustic impedance materials which have a thickness of one quarter wavelength at the desired resonance frequency, while the piezoe...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/32318917804085848060 |