Development of an Innovative Micro Capacitive Humidity Sensor with Double Polyimide Thin Films and Interlacing Out-of-plane Electrodes
碩士 === 國立中山大學 === 電機工程學系研究所 === 94 === Polyimide thin films have been widely used in microelectronic and Micro-Electro-Mechanical System applications due to their many excellent characteristics including low dielectric constant, easy processing, good step coverage ability, high heat resistance and c...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97598980248151472689 |