The Analysis of the Structural Dynamics of MEMS/Chip Precision Positioning Platforms
碩士 === 國立彰化師範大學 === 機電工程學系 === 94 === The purpose of this research is to apply the FEA technique to analyze the structural dynamics of MEMS/Chip precision positioning platforms. By employing the Pro/ENGINEER and Pro/Mechanica-Structure, the dynamics of the precision positioning platform is investiga...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64738838460649086865 |