The Analysis of the Structural Dynamics of MEMS/Chip Precision Positioning Platforms

碩士 === 國立彰化師範大學 === 機電工程學系 === 94 === The purpose of this research is to apply the FEA technique to analyze the structural dynamics of MEMS/Chip precision positioning platforms. By employing the Pro/ENGINEER and Pro/Mechanica-Structure, the dynamics of the precision positioning platform is investiga...

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Bibliographic Details
Main Authors: YUN-CHI YANG, 楊雲淇
Other Authors: 王宜明
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/64738838460649086865