The Analysis of the Structural Dynamics of MEMS/Chip Precision Positioning Platforms

碩士 === 國立彰化師範大學 === 機電工程學系 === 94 === The purpose of this research is to apply the FEA technique to analyze the structural dynamics of MEMS/Chip precision positioning platforms. By employing the Pro/ENGINEER and Pro/Mechanica-Structure, the dynamics of the precision positioning platform is investiga...

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Main Authors:	YUN-CHI YANG, 楊雲淇
Other Authors:	王宜明
Format:	Others
Language:	zh-TW
Published:	2006
Online Access:	http://ndltd.ncl.edu.tw/handle/64738838460649086865

id	ndltd-TW-094NCUE5489001
record_format	oai_dc
spelling	ndltd-TW-094NCUE54890012016-06-03T04:13:38Z http://ndltd.ncl.edu.tw/handle/64738838460649086865 The Analysis of the Structural Dynamics of MEMS/Chip Precision Positioning Platforms 微機電與晶片精密定位平台之結構動力分析 YUN-CHI YANG 楊雲淇碩士國立彰化師範大學機電工程學系 94 The purpose of this research is to apply the FEA technique to analyze the structural dynamics of MEMS/Chip precision positioning platforms. By employing the Pro/ENGINEER and Pro/Mechanica-Structure, the dynamics of the precision positioning platform is investigated. Various effects, due to the variation of physical parameters to the system are studied. In addition, the dynamic responses of the random vibration, dynamic shock, dynamic time, and dynamic frequency are also analyzed in this research. 王宜明 2006 學位論文 ; thesis 138 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立彰化師範大學 === 機電工程學系 === 94 === The purpose of this research is to apply the FEA technique to analyze the structural dynamics of MEMS/Chip precision positioning platforms. By employing the Pro/ENGINEER and Pro/Mechanica-Structure, the dynamics of the precision positioning platform is investigated. Various effects, due to the variation of physical parameters to the system are studied. In addition, the dynamic responses of the random vibration, dynamic shock, dynamic time, and dynamic frequency are also analyzed in this research.
author2	王宜明
author_facet	王宜明 YUN-CHI YANG 楊雲淇
author	YUN-CHI YANG 楊雲淇
spellingShingle	YUN-CHI YANG 楊雲淇 The Analysis of the Structural Dynamics of MEMS/Chip Precision Positioning Platforms
author_sort	YUN-CHI YANG
title	The Analysis of the Structural Dynamics of MEMS/Chip Precision Positioning Platforms
title_short	The Analysis of the Structural Dynamics of MEMS/Chip Precision Positioning Platforms
title_full	The Analysis of the Structural Dynamics of MEMS/Chip Precision Positioning Platforms
title_fullStr	The Analysis of the Structural Dynamics of MEMS/Chip Precision Positioning Platforms
title_full_unstemmed	The Analysis of the Structural Dynamics of MEMS/Chip Precision Positioning Platforms
title_sort	analysis of the structural dynamics of mems/chip precision positioning platforms
publishDate	2006
url	http://ndltd.ncl.edu.tw/handle/64738838460649086865
work_keys_str_mv	AT yunchiyang theanalysisofthestructuraldynamicsofmemschipprecisionpositioningplatforms AT yángyúnqí theanalysisofthestructuraldynamicsofmemschipprecisionpositioningplatforms AT yunchiyang wēijīdiànyǔjīngpiànjīngmìdìngwèipíngtáizhījiégòudònglìfēnxī AT yángyúnqí wēijīdiànyǔjīngpiànjīngmìdìngwèipíngtáizhījiégòudònglìfēnxī AT yunchiyang analysisofthestructuraldynamicsofmemschipprecisionpositioningplatforms AT yángyúnqí analysisofthestructuraldynamicsofmemschipprecisionpositioningplatforms
_version_	1718292241224564736

The Analysis of the Structural Dynamics of MEMS/Chip Precision Positioning Platforms

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