The Analysis of the Structural Dynamics of MEMS/Chip Precision Positioning Platforms
碩士 === 國立彰化師範大學 === 機電工程學系 === 94 === The purpose of this research is to apply the FEA technique to analyze the structural dynamics of MEMS/Chip precision positioning platforms. By employing the Pro/ENGINEER and Pro/Mechanica-Structure, the dynamics of the precision positioning platform is investiga...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/64738838460649086865 |
| Summary: | 碩士 === 國立彰化師範大學 === 機電工程學系 === 94 === The purpose of this research is to apply the FEA technique to analyze the structural dynamics of MEMS/Chip precision positioning platforms. By employing the Pro/ENGINEER and Pro/Mechanica-Structure, the dynamics of the precision positioning platform is investigated. Various effects, due to the variation of physical parameters to the system are studied. In addition, the dynamic responses of the random vibration, dynamic shock, dynamic time, and dynamic frequency are also analyzed in this research.
|
|---|