Study of heterodyne grating interferometer
碩士 === 國立中央大學 === 機械工程研究所 === 94 === A heterodyne interferometry for measurement of the in-plane displacement is proposed. The measurement system includes a heterodyne light source, a moving grating and a lock-in amplifier for phase measurement. The in-plane displacement means that the direction of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46198644654249640003 |