The effect of Methanol/Ethanol added-HF/NH4F solution
碩士 === 國立中央大學 === 機械工程研究所 === 94 === Formation of macro-pore arrays on p-type silicon in fluoride-containing solution by electrochemical etching has been investigated in this work. Effect of wetting coefficient, etching time, Size of the pre-etched holes and pH value are discussed in fluoride-contai...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/04949603478309831666 |