The effect of Methanol/Ethanol added-HF/NH4F solution

碩士 === 國立中央大學 === 機械工程研究所 === 94 === Formation of macro-pore arrays on p-type silicon in fluoride-containing solution by electrochemical etching has been investigated in this work. Effect of wetting coefficient, etching time, Size of the pre-etched holes and pH value are discussed in fluoride-contai...

Full description

Bibliographic Details
Main Authors: Yi-Chi Chou, 周裕齊
Other Authors: Jing-Chie Lin
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/04949603478309831666