Formation of Silicide Nanodot Arrays and 2D Periodic Nanostructures Using Self-Assembly Nanosphere Lithography
碩士 === 國立中央大學 === 化學工程與材料工程研究所 === 94 === As the device dimensions scale down to nanometer region, in-depth understanding the reaction mechanisms between the nanoscale metal thin film and semiconductor substrate will play an important role in defining the use of these nanoscale building blocks in ad...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/99357801097099890743 |