Preliminary Experimental Investigation of a DC Gas Discharge With and Without Magnetron System
碩士 === 國立交通大學 === 機械工程系所 === 94 === In the recent years, the field of gas discharge plasma applications has rapidly expanded in semiconductor industry. The dc discharges has been applied in generating weakly ionized plasmas and has been studied the properties of plasma. The dc glow discharges have b...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/76005548637262812184 |