Transparent thin film transistors fabricated by amorphous InGaZnO4 thin films

碩士 === 國立交通大學 === 電子物理系所 === 94 === In this thesis, we study the transparent thin film transistors fabricated by amorphous InGaZnO4 (a-IGZO) thin films. The Hall measurements indicate that the carrier concentration of a-IGZO film is between 1019~1021 cm-3, resistivity ρ is around 10-3 (Ω-cm), and el...

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Bibliographic Details
Main Authors: Wen-Yuan Ma, 馬文元
Other Authors: Jenh-Yih Juang
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/33645187712147492214