Nove l Low Temperature Poly-Si Thin Film Nonvolatile Memory with Ge nanocrystals Trapping Layer
碩士 === 國立交通大學 === 電子物理系所 === 94 === In this thesis, we proposed the fabrication of low temperature polycrystalline silicon thin film with nonvolatile flash memory as named the SONOS-type poly-Si TFTs memories. To overcome the scaling limits of the conventional FG structure, Tiwari et al. for the fir...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89545642624070452610 |