Intelligent Prognostics System Design and Implementation

• Main Authors: Yu-Chuan Su, 蘇育全
• Other Authors: Fan-Tien Cheng
• Format: Others
• Language: en_US
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/52294261805944836241

博士 === 國立成功大學 === 製造工程研究所碩博士班 === 94 === This dissertation proposes an intelligent prognostics system (IPS) for semiconductor and TFT-LCD manufacturing. The IPS comprises several generic embedded devices (GEDs) and remote clients. The GED can be easily embedded into various types of equipment to acquire equipment engineering data and meet the specification requirements of Interface A for supporting semiconductor industry equipment engineering capabilities. Furthermore, the GED has an open-standard application interface offering any pluggable and customized intelligent applications. With this feature, the intelligent applications can be distributed and localized releasing the factory network burden and enhancing equipment reliability and processing quality. This dissertation also develops two typical pluggable applications: the predictive maintenance scheme (PMS) for detecting equipment faults and the quality prognostics scheme (QPS) for conjecturing equipment-processing quality. Integrating the PMS into the IPS and the QPS into the IPS are respectively accomplished using the conveyor equipment and the sputtering equipment in a TFT-LCD factory. These two illustrative examples clearly demonstrate that IPS is versatile, configurable, and effective.