Intelligent Prognostics System Design and Implementation
博士 === 國立成功大學 === 製造工程研究所碩博士班 === 94 === This dissertation proposes an intelligent prognostics system (IPS) for semiconductor and TFT-LCD manufacturing. The IPS comprises several generic embedded devices (GEDs) and remote clients. The GED can be easily embedded into various types of equipment to acq...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52294261805944836241 |