Effects of annealing on physical properties of ZnO films synthesized by ion beam sputtering－Focus on the application of the anode electrode of PLED
碩士 === 國立成功大學 === 光電科學與工程研究所 === 94 === ZnO films are deposited in glass by Ion-Beam Sputtering method, and the target is ZnO compound. In this research, we choose three methods to treat ZnO films, as follows: in-situ annealing, post-annealing in vacuum, and post-annealing in nitrogen atmosphere....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65724490839478465827 |