Photoluminescence studies on silicon nanostructure grown by thermal evaporation

碩士 === 國立成功大學 === 光電科學與工程研究所 === 94 === Abstract The experiment takes thermal evaporation method to synthesis nc-Si. First, we deposit nc-Si on different substrates. Second, we adjust the O2 pressure (4.8mTorr ~ 1atm) and the temperature (300oC ~ 1200oC) in annealing to affect the structure of QDs w...

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Bibliographic Details
Main Authors: Yang-Chieh Pai, 白仰傑
Other Authors: Shien-Long Tien
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/85528552693734436447