A Study on Microstructure and Mechanical Properties of Nanocomposite Films Deposited by Physical Vapor Deposition
博士 === 國立成功大學 === 機械工程學系碩博士班 === 94 === In this study, we utilized the method of physical vapor deposition (PVD) to form the single-layer C, two-layer C/a-Si and three-layer a-Si/C/a-Si nanocomposite films using ultra high vacuum ion beam sputtering (UHV IBS) system, Ti-containing diamond-like hydro...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Online Access: | http://ndltd.ncl.edu.tw/handle/82072871094886530727 |