An Theoretical and Experimental Study on the Melting of Silicon Substrate Subjected to Excimer Laser Radiation
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 94 === Laser assisted direct imprinting (LADI) technology is a special kind of nanoimprint technology which applies a preloaded nano-mold and a high-energy laser pulse. The laser pulse can instantaneously melt the sample surface to make the pattern transfer from the...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04871697045728239164 |