A Study on the microstructure and mechanical properties of Ta-Si-N nanocomposite thin films by reactive co-sputtering
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 94 === In this study, the nanocomposites of Ta-Si-N thin films were prepared by reactive magnetron co-sputtering system and were annealed by RTA in various temperatures. With different temperatures, the thin films were used to be examined its thermal stability. This...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69960881272434104232 |