Precision Position Control of a Biaxial Pneumatic Servo Table Embedded with Aerostatic Bearing
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 94 === This paper is to built a biaxial pneumatic servo table by combining the air cylinder embedded with aerostatic bearing and a aerostatic bearing, which is used non-contact characteristic of aerostatic bearing in its application, expect to overcome the stick-slip...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79265958138732773998 |