Investigation of Liquid Phase Oxidation on GaAs-based Materials and Its Applications
博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 94 === A newly developed liquid-phase oxidation technique, named liquid phase chemical-enhanced oxidation (LPCEO), for GaAs-based device applications has been proposed. The GaAs-based wafers are only immersed in a growth solution to form the oxidized film on the Ga...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38638164572166543336 |