A study of low temperature growing nanocrystalline silicon films and thin film transistor using hot-wire chemical vapor deposition
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 94 === Recently amorphous thin film transistor (a-Si),low temperature poly-Si TFT ,and nanocrystalline TFT(nc-Si TFT) have been studies widthly for flat panel display. However the fabrication process of amorphous silicon thin film transistor (a-Si TFT) is simple bu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86003493367046764521 |