Investigation of a New Etching Process for InGaN/GaN LEDs Fabrication
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 94 === Investigation of a New Etching Process for InGaN/GaN LEDs Fabrication Wei-Chih Chen* Wei-Chou Hsu** Institute of Microelectronics, Department of Electrical Engineering National Chen Kung University Tainan, Taiwan R.O.C Abstract A novel Photo-Enhanced Chem...
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| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42440030305448917891 |