Characteristics Testing on a Underwater Piezoresistive MEMS sensor and its application
碩士 === 國立成功大學 === 系統及船舶機電工程學系碩博士班 === 94 === This study focus on establishing the standard characteristics testing on MEMS sensor. Also the application and promotion for underwater acoustic MEMS sensor are our goal. These testing sensors are piezoresistive sensors which fabricated by MEMS process....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25610964460467950649 |