Anti-etching mechanism of the patterned ultra-thin SAMs-based resist on Au(111)-dominant surface
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 94 === Self-assembled monolayers (SAMs) are capable to form a functionalized surface on a metal surface with good uniformity and stability. In this study, alkanethiolate molecules with -CH3 terminated tail group chemically adsorb upon Au substrate and form Au-S bo...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80138792614591090460 |