Investigation on the electroplating behavior of Cu deposited on a tip
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 94 === Because of the shape effect of substrate, the current density will concentrate on a tip. The present work investigated the behavior of electroplating Cu on a probe tip. AFM probes were used as electrodes for the electroplating system and the tips were fixed...
Main Authors: | Shinn-Yu Chen, 陳信宇 |
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Other Authors: | Kwang-Lung Lin |
Format: | Others |
Language: | zh-TW |
Published: |
2006
|
Online Access: | http://ndltd.ncl.edu.tw/handle/52375271649092167838 |
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