Investigation on the electroplating behavior of Cu deposited on a tip

碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 94 === Because of the shape effect of substrate, the current density will concentrate on a tip. The present work investigated the behavior of electroplating Cu on a probe tip. AFM probes were used as electrodes for the electroplating system and the tips were fixed...

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Bibliographic Details
Main Authors: Shinn-Yu Chen, 陳信宇
Other Authors: Kwang-Lung Lin
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/52375271649092167838