The deformation of Thin Film-Substrate System

• Main Authors: Kun-Yao Chen, 陳琨曜
• Other Authors: Tung-yang Chen
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/91987788001529731020

碩士 === 國立成功大學 === 土木工程學系碩博士班 === 94 === During the process of thin film deposition, residual stress will be induced in most of the situations when the thin film gets in touch with the substrate. Deformation of the substrate usually occurs when the stress attains the limitation at a certain value. Therefore, it is informative to characterize the stress evolution of the thin film in a reasonable manner. Based on the classical plate theory, a mathematical framework is constructed and the mechanical behavior is estimated when the thin film stress is caused by the deformation of the substrate. We have derived the exact solutions based on the framework and compared the results with the well-known Stoney formula. The discrepancy of the two results will be addressed. Furthermore, the underlying reasons for the inaccuracy will be assessed. A reasonable model is also constructed to provide numerical solutions in contrast with the finite element calculations, ABAQUS.