The deformation of Thin Film-Substrate System
碩士 === 國立成功大學 === 土木工程學系碩博士班 === 94 === During the process of thin film deposition, residual stress will be induced in most of the situations when the thin film gets in touch with the substrate. Deformation of the substrate usually occurs when the stress attains the limitation at a certain value. Th...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/91987788001529731020 |