Micro Humidity Sensors integrated with WO3 films and Circuits
碩士 === 國立中興大學 === 精密工程學系所 === 94 === This study investigates the fabrication of humidity sensors integrated with micro heater and readout circuit using the commercial 0.35μm CMOS process. This sensing film of humidity sensors is tungsten trioxide that is prepared by a sol-gel process and calcined at...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41874271533065662761 |