A Study of Sacrificial Layer Technology for the Fabrication of Assembly Si-based Electret Condenser Microphones
碩士 === 國立中興大學 === 精密工程學系所 === 94 === In this paper we had developed a high sensitivity assembly Si-based electret condenser microphone using wafer transfer technology and magnetic force collection method. An electret microphone mainly consists of three parts, a diaphragm, a spacer and an electret ba...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/ffjsc6 |