Design and Analysis of Six Degree-of-Freedom Precision Positioning Stage

• Main Authors: Yi-Min Li, 李一民
• Other Authors: 陳昭亮
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/13624870520749293096

碩士 === 國立中興大學 === 機械工程學系所 === 94 === The purpose of this research is to design a six degree-of-freedom positioning stage. By using flexure hinge and piezoelectric actuator, this stage can achieve precision positioning with nanometer resolution. The Checklist method was used to solve the problem embedded in the conventional precision stage and generate a new conceptual design. We designed a positioning stage in monolithic mechanism with six degree-of-freedom. In this thesis, the functional requirements were discussed firstly. A conceptual design was followed according to these functional requirements. Then a mathematical model of the stage was constructed. Finite element analysis with experiment was conducted to verify the design. The experiment results show that the stage can achieve a maximum displacement 13.8μm in X axis; 13.68μm in Y axis; and 18.58μm in Z axis. The stage can also achieve a maximum rotation 42.4 μrad around X axis; 351.36μrad around Y axis; and 330.44 μrad around Z axis.