Design and Analysis of Six Degree-of-Freedom Precision Positioning Stage
碩士 === 國立中興大學 === 機械工程學系所 === 94 === The purpose of this research is to design a six degree-of-freedom positioning stage. By using flexure hinge and piezoelectric actuator, this stage can achieve precision positioning with nanometer resolution. The Checklist method was used to solve the problem embe...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/13624870520749293096 |