The properties of Sc-doped ZnO films deposited by RF magnetron sputtering.
碩士 === 明新科技大學 === 電子工程研究所 === 94 === Transparent and conductive oxide (TCO) films, which are derivated from wide band-gap semiconductors with low specific resistance and high transparency in the visible wavelength range, have found wide applications in recent years. Highly conductive and transparent...
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| Format: | Others |
| Language: | zh-TW |
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2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99573422705490562599 |