Measurement of Coefficient of Thermal Expansion, Young’s Modulus and Poisson’s Ratio of the Thin Film by Optical Interferometry and Nanoindentation System
碩士 === 逢甲大學 === 機械工程學所 === 94 === Since the system components become smaller, the thin film materials are widely applicable. The thin films are the constituent materials of MEMS and NEMS and therefore the reliability of components are considerably influenced by the mechanical properties of thin fil...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22581732136563523124 |