A Study and Fabrication of Array–type MEMS Probe Card
碩士 === 逢甲大學 === 資訊電機工程碩士在職專班 === 94 === The first probe card, called a needle/epoxy ring probe card, was developed in 1969 and the same basic technology is still used today. However, the implementation of high performance probe becomes difficult with the conventional technology, because the number o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86760216606767280206 |