Investigation on the Application of the Particle Removal Mechanism of Ultra-Sonic Air Flow to Clean Glass Surface

碩士 === 逢甲大學 === 材料與製造工程所 === 94 === In the thin film transistor liquid-crystal display industry domain, to remove the dust particle form glass plate surface, there are mainly dry and wet types of cleaning technologies. The paper takes dry cleaner to be the cleaning technology as the research foundat...

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Bibliographic Details
Main Authors: Ming-I Huang, 黃明夷
Other Authors: Chao-Yin Hsiao
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/85892975985789794681