Fabrication of A Microcantilever Beam by Electroforming
碩士 === 大葉大學 === 機電自動化研究所碩士班 === 94 === This research focuses on the fabrication of a cantilever beam microstructure on a stainless steel substrate (SUS-301). Electroforming of a copper sacrificial layer and a nickel structural layer are used in the microfabriction process. A negative photoresist JSR...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31411329424289805856 |