Micro Cantilever-Based Flow Meter for High Airflow Velocity Measurement
碩士 === 大葉大學 === 機電自動化研究所碩士班 === 94 === This paper exploits a bending-up cantilever caused by residual stress to manufacture a micro gas flow sensor. Micro sensors not only have a smaller physical size than their traditional counterparts, but also provide a greater measurement accuracy and a higher s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24560890219622203053 |