Fabrication of Micro Formaldehyde Gas Sensor
碩士 === 大葉大學 === 機械工程研究所碩士班 === 94 === ABSTRACT A novel micro formaldehyde gas sensor with a sputtered NiO thin film integrated with a micro hotplate was fabricated. A microfabricated formaldehyde gas sensor is developed which uses a silica substrate with Pt micro heaters as the micro hotplate and a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83767525429677899597 |