A Novel Method to Predict the Pull-in Voltage for Deformed Micro-plates Actuated by a Distributed Electrostatic Force
博士 === 中原大學 === 機械工程研究所 === 94 === This study is devoted to find the precise pull-in voltage/position of a micro-device formed by two parallel charged plates. The pull-in is a phenomenon that the electrostatic force induced by the applied voltage across two plates of the device exceeds the elastic,...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22993908270113559208 |