Plasma Diagnostics and Modeling of Inductive-Coupled SF6 Plasma Reactor
碩士 === 中原大學 === 化學工程研究所 === 94 === Abstract In this study, the characteristics of inductively coupled SF6 plasma were investigated using mass spectrometry, optical emission spectroscopy and Langmuir probe. A combination of experimental diagnostics and computational modeling was utilized to under...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52981811871752191590 |