Development and Applications of a Ultra-violet Lithography Variable Focal Length Rapid Prototyping Fabrication for Micro-structure Components
碩士 === 長庚大學 === 機械工程研究所 === 94 === The precise manufature of micro-structure componets is the mainly significant technique of Micro-Electro-Mechanical Systems (MEMS). According to the definition of Science & Technology Policy Reseach Center (STPI) micro-structure component means that size or p...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52030933150487409190 |